ME-5000 Sheet-Type Spin Etcher
It is a sheet-type spin etcher compatible with 300mm wafers and double-sided processing!
The "ME-5000" is a single-wafer spin etcher compatible with 300mm/8.6.4 inch silicon wafers, as well as 8.6.4 inch SiC and GaN wafers, featuring a mechanical grip. The etching chamber has a movable upper and lower mechanism, allowing for rotation and vertical movement with two arms. An airflow is created inside the cleaning cover, and the chemicals are separated and recovered using five types: four types of acid-based solutions and pure water. For more details, please contact us or download the catalog.
- Company：マック産業機器 テクノロジーセンター
- Price：Other
